Nonintrusive wafer temperature measurement usinginsituellipsometry

Direct Measurement of Wafer Temperature in White/UV LED Manufacture

Evaluation of Fear Using Nonintrusive Measurement of Multimodal Sensors

Most previous research into emotion recognition used either a single modality or multiple modalities of physiological signal. However, the former method allows for limited enhancement of accuracy, and the latter has the disadvantages that its performance can be affected by head or body movements. Further, the latter causes inconvenience to the user due to the sensors attached to the body. Among...

On-wafer measurements of noise temperature

The NIST Noise Project has developed the theoretical formalism and experimental methods for performing accurate noise-temperature measurements on a wafer. This report summarizes the theoretical formulation and describes the design, methods, and results of tests performed to verify our ability to measure on-wafer noise temperature. Several different configurations with known off-wafer noise sour...

Modeling, Measurement, and Standards for Wafer Inspection

The major technical issues regarding the calibration of Surface Scanning Inspection Systems (SSIS) are presented including descriptions of the salient features of SSISs and the deposition system using the differential mobility analyzer. The role of the NIST SRM 1963 (100 nm) as a calibration standard is discussed. Data from round robin experiments, which NIST has helped the SEMI SSIS Task Forc...

Adaptive Control of Wafer Temperature in Rtp